MEMS-Vorrichtung
WP 60 2013 005 724.9 - B81B 3/00. AT 27.03.2013; OT 03.10.2013; PT 23.03.2016. Anm.: Kabushiki Kaisha Toyota Chuo Kenkyusho, Nagakute-shi, Aichi-ken, JP. Erf.: Ozaki, Takashi, Aichi-ken 480-1192, JP Fujitsuka, Norio, Aichi-ken 480-1192, JP Shimaoka, Keiichi, Aichi-ken 480-1192, JP Nonomura, Yutaka, Aichi-ken 480-1192, JP