Mikroelektromechanisches System
WP 11 2011 102 124.0 - B81B 3/00. AT 15.06.2011; OT 29.12.2011; PT 26.11.2015. Anm.: International Business Machines Corporation, Armonk, N.Y., US. Erf.: Stamper, Anthony, Essex Junction, Vt., US Jahnes, Christopher Vincent, Yorktown Heights, N.Y., US.