System zur chemischen Gasphasenabscheidung

WP 602 42 104.7 – C23C 16/00. AT 07.08.2002; OT 27.02.2003; PT 25.01.2012. Anm.: First Solar, Inc, Phoenix, US. Erf.: Foote, James, B., Toledo, OH 43623, US, Hinkle, James, E., Temperance, MI 48182, US, Faykosh, Gary, T., Perrysburg, OH 43551, US.