Amorphes Ge/Te Beschichtungsverfahren

EP 60 2008 020 189.9 – C23C 16/30. AT 31.10.2008; OT 09.07.2009; PT 21.11.2012. Anm.: Advanced Technology Materials, Inc., Danbury, US. Erf.: Hunks, William, Waterbury, Connecticut 06705, US, Li, Weimin, New Milford, Connecticut 06776, US, Stender, Matthias, New Milford, Connecticut 06776, US, Chen, Tianniu, Rocky Hill, Connecticut 06067, US, Hendrix, Bryan C., Connecticut 06811, US, Stauf, Gregory T., Connecticut 06776, US, Chen, Philip S.H., Bethel, Connecticut 06801, US, Cameron, Thomas M., Connecticut 06470, US, Roeder, Jeffrey R., Brookfield, Connecticut 06804, US, Xu, Chongying, New Milford, Connecticut 06776, US.

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