Kohlenstofffilmbeschichtung

WP 60 2011 032 705.4 - C23C 16/26. AT 25.02.2011; OT 01.09.2011; PT 23.11.2016. Anm.: National Institute of Advanced Industrial Science and Technology, Tokyo, JP. Erf.: Hasegawa, Masataka, Tsukuba-shiIbaraki 305-8565, JP Ishihara, Masatou, Tsukuba-shiIbaraki 305-8565, JP Koga, Yoshinori, Tsukuba-shiIbaraki 305-8565, JP Kim, Jaeho, Tsukuba-shiIbaraki 305-8565, JP Tsugawa, Kazuo, Tsukuba-shiIbaraki 305-8565, JP Iijima, Sumio, Tsukuba-shiIbaraki 305-8565, JP