Verfahren und System zur stromlosen Abscheidung

WP 60 2004 037 982.4 – C23C 18/28. AT 25.06.2004; OT 27.01.2005; PT 30.05.2012. Anm.: Hewlett-Packard Development Company, L.P., Houston, US. Erf.: Berhane, Samson, Corvallis, OR 97330-4239, US, Punsalan, David, Eugene, OR 97401, US, Herman, Gregory S., Albany, OR 97321, US, Mardilovich, Peter, Corvallis, OR 97330, US.