Ätzzusammensetzung

WP 60 2013 012 033.1 - C23F 1/16. AT 31.07.2013; OT 13.03.2014; PT 21.09.2016. Anm.: Fujifilm Corporation, Tokyo, JP; Fujifilm Electronic Materials USA, Inc., North Kingstown, R.I., US. Erf.: Takahashi, Kazutaka, Yaizu city, Shizuoka prefecture 425-0073, JP Mizutani, Atsushi, Haibara-Gun, Shizuoka, JP Takahashi, Tomonori, Mesa, Arizona 85206, US