System zur chemischen Gasphasenabscheidung

EP 602 43 823.3 – C23C 16/00. AT 07.08.2002; OT 04.05.2011; PT 03.10.2012. Anm.: First Solar, Inc, Phoenix, US. Erf.: Hinkle, James E., Lambertville, MI 48144, US, Foote, James B., Toledo, OH 43623, US, Faykosh, Gary T., Perrysburg OH 43551, US.