Organoaminosilan-Vorläufer und Verfahren zum Ablagern von Filmen damit

EP 60 2011 009 560.9 – C23C 16/30. AT 02.06.2011; OT 07.12.2011; PT 03.09.2014. Anm.: Air Products and Chemicals, Inc., Allentown, Pa., US. Erf.: Bowen, Heather Regina, Vista, CA California 92083, US, Lei, Xinjian, Vista, CA California 92081, US, Cheng, Hansong, Singapore 117543, SG, O'Neill, Mark Leonard, San Marcos, CA California 92078, US, Xiao, Manchao, San Diego, CA California 92130, US.