Vorrichtung zum doppelseitigen Polieren

WP 100 81 456.5 - B24B 37/04. AT 17.05.2000; OT 23.11.2000; PT 15.09.2016. Anm.: Kashiwara Machine Mfg. Co., Ltd., Kashiwara, Osaka, JP; Sumitomo Mitsubishi Silicon Corp., Tokio/Tokyo, JP. Erf.: Horiguchi, Akira, Kashiba, Nara, JP Isobe, Ken, Shijyonawate, Osaka, JP Takeda, Tsuneo, Karatsu, Saga, JP Murata, Kiyohide, Nishinomiya, Hyogo, JP Takeda, Tsuneo, Sourakugun, Kyoto, JP Uzu, Yoshiaki, Ikomagun, Nara, JP Matsumoto, Hiroshi, Ikomagun, Nara, JP Fukushima, Tomio, Fujiidera, Osaka, JP