Plasmaimmersionsionenverarbeitung zur Beschichtung hohler Substrate

WP 60 2008 041 267.9 - C23C 16/26. AT 21.05.2008; OT 04.12.2008; PT 18.11.2015. Anm.: Southwest Research Institute, San Antonio, Tex., US. Erf.: Wei, Ronghua, San Antonio, Texas 78240, US Rincon, Christopher, San Antonio, Texas 78253, US Arps, James H., Chanhassen, Minnesota 55317, US