Sputtertarget/Rückplatte-Verbindungselement

WP 60 2007 025 122.2 – C23C 14/34. AT 02.05.2007; OT 03.01.2008; PT 29.08.2012. Anm.: JX Nippon Mining & Metals Corp., Tokyo, JP. Erf.: Oda, Kunihiro c/o Isohara Factory of N... Ltd., Kitaibaraki-shi, Ibaraki 3191535, JP, Fukushima, Atsushi c/o Isohara Factory of N... Ltd., Kitaibaraki-shi, Ibaraki 3191535, JP.