Vorrichtung zur Ausbildung von dünnen Filmen
WP 60 2005 047 598.2 - C23C 14/50. AT 10.02.2005; OT 18.08.2005; PT 30.09.2015. Anm.: ULVAC, Inc., Chigasaki-shi, Kanagawa, JP. Erf.: Matsumoto, Takafumi; c/o ULVAC, Inc., 2500,, 2538543, JP Mikami, Shun; c/o ULVAC, Inc., 2500,, 2538543, JP Hanzawa, Kouichi; c/o ULVAC, Inc., 2500,, 2538543, JP Moriya, Mineharu; c/o ULVAC, Inc.,, 2538543, JP Odagi, Hideyuki; c/o ULVAC, Inc., 2500,, 2538543, JP Shimada, Tetsuya; c/o ULVAC, Inc.,, 2538543, JP Kubo, Masashi; c/o ULVAC, Inc.,, agawa; 2538543, JP Ikeda, Susumu; c/o ULVAC, Inc., 2500,, 2538543, JP