Verfahren und System zur chemischen Dampfabscheidung

WP 600 49 065.3 - C23C 16/18. AT 21.12.2000; OT 05.07.2001, PT 02.09.2015. Anm.: nGimat Co., Norcross, Ga., US. Erf.: Hunt, Andrew, T., Atlanta, GA 30342, US; Deshpande, Girish, Atlanta, GA 30329, US; Hwang, Jan, Tzyy-Jiuan, Alpharetta, GA 30022, US; Laye, Nii, Sowa, Los Angeles, CA 90037, US; Oljaca, Miodrag, Avondale Estates, GA 30002, US; Shanmugham, Subramaniam, Duluth, GA 30096, US; Shoup, Shara, S., Woodstock, GA 30188, US; Tomov, Trifon, Duluth, GA 30096, US; Dalzell, William, J., Jr., Lawrenceville, GA 30043, US; Poda, Aimee, Smyrna, GA 30082, US Hendrick, Michelle, Winder, GA 30680, US.