Poliervorrichtung

EP 60 2008 022 974.2 – B24B 37/32. AT 29.10.2008; OT 18.06.2009; PT 20.03.2013. Anm.: Ebara Corporation, Tokio/Tokyo, JP. Erf.: Saito, Koji, Tokyo, JP, Togawa, Tetsuji, Tokyo, JP, Fukushima, Makoto, Tokyo, JP, Nabeya, Osamu, Tokyo, JP, Yasuda, Hozumi, Tokyo, JP.