Polierscheibe mit Mikroporenregionen
WP 60 2005 037 236.9 – B24B 37/00. AT 31.08.2005; OT 20.09.2007; PT 28.11.2012. Anm.: Cabot Microelectronics Corporation, Aurora, US. Erf.: Prasad, Abaneshwar, Aurora, IL 60504, US.
WP 60 2005 037 236.9 – B24B 37/00. AT 31.08.2005; OT 20.09.2007; PT 28.11.2012. Anm.: Cabot Microelectronics Corporation, Aurora, US. Erf.: Prasad, Abaneshwar, Aurora, IL 60504, US.