Verfahren zur Ausbildung eines kupferhaltigen Films

WP 60 2005 036 828.0 – C23C 16/18. AT 27.09.2005; OT 06.04.2006; PT 31.10.2012. Anm.: Ulvac, Inc., Chigasaki-shi, JP; Ube Industries, Ltd., Ube-shi, JP. Erf.: Kadota, Takumi, c/o UBE INDUSTRIES, LTD.,, Ube-shi, Yamaguchi 7558633, JP, Watanuki, Kouhei, c/o UBE INDUSTRIES, LTD.,, Ube-shi, Yamaguchi 7558633, JP, Watanabe, Mikio, c/o ULVAC, Inc.,, Susono-shi, Shizuoka 4101231, JP, Hasegawa, Chihiro, c/o UBE INDUSTRIES, LTD.,, Ube-shi, Yamaguchi 7558633, JP, Zama, Hideaki, c/o ULVAC, Inc.,, Susono-shi, Shizuoka 4101231, JP.