Zyklische chemische Dampfphasenabscheidung von Metall-Silizium-haltigen Schichten

EP 60 2007 036 215.6 – C23C 16/34. AT 13.12.2007; OT 02.07.2008; PT 23.04.2014. Anm.: Air Products and Chemicals, Inc., Allentown, US. Erf.: Gaffney, Thomas Richard, Carlsbad, CA 92009, US, Thridandam, Hareesh, Vista, CA 92081, US, Bowen, Heather Regina, Vista, CA 92083, US, Lei, Xinjian, Vista, CA 92081, US, Xiao, Manchao, San Diego, CA 92130, US.