Plasmaverstärkte Atomlagen-Dampfabscheidung siliciumhaltiger Schichten

EP 60 2008 039 006.3 - C23C 16/30. AT 26.02.2008; OT 10.09.2008; PT 15.07.2015. Anm.: Air Products and Chemicals, Inc., Allentown, Pa., US. Erf.: Thridandam, Hareesh, Vista, PA 92081, US; Xiao, Manchao, San Diego, CA 92130, US; Lei, Xinjian, Vista, CA 92081, US; Gaffney, Thomas Richard, Carlsbad, CA 92009, US; Karwacki, Jr., Eugene Joseph, Orefield, PA 18069, US.