Verfahren zur Bildung Einer Mikrostruktur

WP 60 2009 030 693.6 – C23C 18/16. AT 25.06.2009; OT 07.01.2010; PT 15.04.2015. Anm.: 3M Innovative Properties Co., St. Paul, Minn., US. Erf.: Mora, Cristin, E., Saint Paul, MN 55133-3427, US, Stay, Matthew, S., Saint Paul, MN 55133-3427, US, Frey Matthew H., Saint Paul, MN 55133-3427, US, Pekurovsky, Mikail L., Saint Paul, MN 55133-3427, US.