Polierkopf und Poliervorrichtung

WP 11 2007 002 571.9 - B24B 37/30. AT 18.10.2007; OT 02.05.2008; PT 02.03.2017. Anm.: Shin-Etsu Handotai Co., Ltd., Tokyo, JP; Fujikoshi Machinery Corp., Nagano-shi, JP. Erf.: Masumura, Hisashi, Fukushima, JP Kitagawa, Koji, Fukushima, JP Morita, Kouji, Fukushima, JP Kishida, Hiromi, Nagano-shi, Nagano, JP Arakawa, Satoru, Nagano-shi, Nagano, JP