Hochratiges Polierverfahren
EP 60 2009 041 232.9 - B24B 37/04. AT 13.03.2009; OT 30.06.2010; PT 21.09.2016. Anm.: Rohm and Haas Electronic Materials CMP Holdings, Inc., Newark, Del., US. Erf.: Muldowney, Gregory P., Earleville, MD 21919, US.
EP 60 2009 041 232.9 - B24B 37/04. AT 13.03.2009; OT 30.06.2010; PT 21.09.2016. Anm.: Rohm and Haas Electronic Materials CMP Holdings, Inc., Newark, Del., US. Erf.: Muldowney, Gregory P., Earleville, MD 21919, US.