Mit amorphem Kohlenstoff beschichtetes Werkzeug und Verfahren zu seiner Herstellung

EP 602 46 142.1 – C23C 30/00. AT 13.06.2002; OT 18.12.2002; PT 02.04.2014. Anm.: Nissin Electric Co., Ltd., Kyoto-shi, JP; Sumitomo Electric Industries, Ltd., Osaka-shi, JP. Erf.: Ohara, Hisanori, c/o Sumitomo Electric Ind. Ltd., Itami-shi, Hyogo, JP, Ikegaya, Akihiko c/o Sumitomo Electric Ind. Ltd., Itami-shi, Hyogo, JP, Tsuda, Keiichi, c/o Sumitomo Electric Ind. Ltd., Itami-shi, Hyogo, JP, Setoyama, Makoto, c/o Nippon ITF Co. Ltd., Kyoto-shi, Kyoto, JP, Fukui, Haruyo, c/o Sumitomo Electric Ind. Ltd., Itami-shi, Hyogo, JP, Moriguchi, Hideki c/o Sumitomo Electric Ind. Ltd., Itami-shi, Hyogo, JP, Okazaki, Naoto, c/o Nissin Electric Co. Ltd., Kyoto-shi, Kyoto, JP, Ogata, Kiyoshi, c/o Nissin Electric Co. Ltd., Kyoto-shi, Kyoto, JP, Ohtani, Satoshi, c/o Nissin Electric Co. Ltd., Kyoto-shi, Kyoto, JP, Irie, Miki, c/o Sumitomo Electric Ind. Ltd., Itami-shi, Hyogo, JP, Utsumi, Yoshiharu, c/o Sumitomo Electric Ind. Ltd., Itami-shi, Hyogo, JP.